Liquid Metal Patterning and Unique Properties for Next-Generation Soft Electronics.

Room-temperature liquid metal (LM)-based electronics is expected to bring advancements in future soft electronics owing to its conductivity, conformability, stretchability, and biocompatibility. However, various difficulties arise when patterning LM because of its rheological features such as fluidity and surface tension. Numerous attempts are made to overcome these difficulties, resulting in various LM-patterning methods. An appropriate choice of patterning method based on comprehensive understanding is necessary to fully utilize the unique properties. Therefore, the authors aim to provide thorough knowledge about patterning methods and unique properties for LM-based future soft electronics. First, essential considerations for LM-patterning are investigated. Then, LM-patterning methods-serial-patterning, parallel-patterning, intermetallic bond-assisted patterning, and molding/microfluidic injection-are categorized and investigated. Finally, perspectives on LM-based soft electronics with unique properties are provided. They include outstanding features of LM such as conformability, biocompatibility, permeability, restorability, and recyclability. Also, they include perspectives on future LM-based soft electronics in various areas such as radio frequency electronics, soft robots, and heterogeneous catalyst. LM-based soft devices are expected to permeate the daily lives if patterning methods and the aforementioned features are analyzed and utilized.

Fabrication of Nanostructures on a Large-Area Substrate with a Minimized Stitch Error Using the Step-and-Repeat Nanoimprint Process.

Nanoimprint lithography (NIL) is suitable for achieving high uniformity and mass production. However, in conventional NIL, a stamp suitable for the substrate size is required to increase the substrate size. To address this issue, we fabricated nanostructures on a large-area substrate using step-and-repeat NIL after making a small stamp. A stamp was produced using glass, and a nano-pillar pattern with a diameter of 600 nm, an interval of 400 nm, and a height of 270 nm was used during the experiment. The area of the pattern on the stamp was 10 mm × 10 mm, and the step-and-repeat process was performed 25 times to transfer the nanostructures to a 4-inch substrate. In addition, stitch gaps were created between the patterns, which could decrease the performance upon future application. To minimize this stitch gap, a high-precision glass scale was attached to the stamp feeder to precisely control the position and to minimize the step difference. Moreover, an experiment was conducted to minimize the stitch gap by adjusting the movement interval of the stamp, and the stitch spacing was minimized by moving the stamp position by 9.97 mm. This approach will facilitate the manufacturing of large-area substrates and other structures in the future.

Hierarchically Porous, Laser-Pyrolyzed Carbon Electrode from Black Photoresist for On-Chip Microsupercapacitors.

We report a laser-pyrolyzed carbon (LPC) electrode prepared from a black photoresist for an on-chip microsupercapacitor (MSC). An interdigitated LPC electrode was fabricated by direct laser writing using a high-power carbon dioxide (CO2) laser to simultaneously carbonize and pattern a spin-coated black SU-8 film. Due to the high absorption of carbon blacks in black SU-8, the laser-irradiated SU-8 surface was directly exfoliated and carbonized by a fast photo-thermal reaction. Facile laser pyrolysis of black SU-8 provides a hierarchically macroporous, graphitic carbon structure with fewer defects (ID/IG = 0.19). The experimental conditions of CO2 direct laser writing were optimized to fabricate high-quality LPCs for MSC electrodes with low sheet resistance and good porosity. A typical MSC based on an LPC electrode showed a large areal capacitance of 1.26 mF cm-2 at a scan rate of 5 mV/s, outperforming most MSCs based on thermally pyrolyzed carbon. In addition, the results revealed that the high-resolution electrode pattern in the same footprint as that of the LPC-MSCs significantly affected the rate performance of the MSCs. Consequently, the proposed laser pyrolysis technique using black SU-8 provided simple and facile fabrication of porous, graphitic carbon electrodes for high-performance on-chip MSCs without high-temperature thermal pyrolysis.

Highly Sensitive and Reliable microRNA Detection with a Recyclable Microfluidic Device and an Easily Assembled SERS Substrate.

Surface-enhanced Raman spectroscopy (SERS) detection in microfluidics is an interesting topic because of its high sensitivity, miniaturization, and ability to perform online detection. However, the difficulties in generating SERS-based microfluidic devices with uniform signal reproducibility and high sensitivity have hindered their widespread application. In addition, the recyclability of the SERS-based microfluidic devices can contribute to their broad commercialization, but the possible contamination in the detection area and cumbersome cleaning procedures remain a challenge. In this study, we describe a repeatable SERS-based microfluidic device comprising a disposable SERS substrate and a reusable microfluidic channel. The microfluidic channel was prepared via mechanical processing, and the SERS substrate was fabricated by nanoimprint lithography and electrodeposition. The SERS substrate and microfluidic channel can be attached easily because they were assembled using screws. The SERS substrate achieved an excellent SERS enhancement factor greater than 108 over a large sample area, signal uniformity, and substrate-to-substrate reproducibility. This guaranteed reliable and sensitive signals in every experiment. Furthermore, the disposable SERS substrate contributed exact detection of target molecules. Finally, their practical application was demonstrated with the repeated use of the microfluidic device by detecting a specific micro-RNA, (miR-34a) at a concentration as low as 5 fM.

Selective Transfer of Light-Emitting Diodes onto a Flexible Substrate via Laser Lissajous Scanning.

As the light-emitting diode (LED) size gradually decreases, it is difficult to conventionally transfer an LED onto a donor substrate. In this paper, we propose a print transfer method that selectively transfers an LED onto a UV release tape, i.e., the donor substrate, via focused laser scanning with Lissajous patterns. We implemented an optical system based on focused laser scanning to perform selective transfer; this can adjust the scanning area immediately without changing the donor substrate size according to the LED size. Because the commercialized UV release tape is utilized as a donor substrate, the adhesion between the LED and donor substrate can be constantly maintained even after repeated experiments. In this study, several LEDs were transferred to a flexible printed circuit board-arranged in a circular and square shape to demonstrate a high degree of freedom of the system-and turned on.

Antibacterial Nanopillar Array for an Implantable Intraocular Lens.

Postsurgical intraocular lens (IOL) infection caused by pathogenic bacteria can result in blindness and often requires a secondary operation to replace the contaminated lens. The incorporation of an antibacterial property onto the IOL surface can prevent bacterial infection and postoperative endophthalmitis. This study describes a polymeric nanopillar array (NPA) integrated onto an IOL, which captures and eradicates the bacteria by rupturing the bacterial membrane. This is accomplished by changing the behavior of the elastic nanopillars using bending, restoration, and antibacterial surface modification. The combination of the polymer coating and NPA dimensions can decrease the adhesivity of corneal endothelial cells and posterior capsule opacification without causing cytotoxicity. An ionic antibacterial polymer layer is introduced onto an NPA using an initiated chemical vapor deposition process. This improves bacterial membrane rupture efficiency by increasing the interactions between the bacteria and nanopillars and damages the bacterial membrane using quaternary ammonium compounds. The newly developed ionic polymer-coated NPA exceeds 99% antibacterial efficiency against Staphylococcus aureus, which is achieved through topological and physicochemical surface modification. Thus, this paper provides a novel, efficient strategy to prevent postoperative complications related to bacteria contamination of IOL after cataract surgery.

System for Fabrication of Large-Area Roll Molds by Step-and-Repeat Liquid Transfer Imprint Lithography.

The effective production of nanopatterned films generally requires a nanopatterned roll mold with a large area. We report on a novel system to fabricate large-area roll molds by recombination of smaller patterned areas in a step-and-repeat imprint lithography process. The process is accomplished in a method similar to liquid transfer imprint lithography (LTIL). The stamp roll with a smaller area takes up the liquid resist by splitting from a donor substrate or a donor roll. The resist is then transferred from a stamp roll to an acceptor roll and stitched together in a longitudinal and, if necessary, in a circumferential direction. During transfer, the nanostructured resist is UV-exposed and crosslinked directly on the acceptor roll. The acceptor roll with the stitched and recombined stamp patterns is ready to be used as a large-area roll mold for roll-based imprinting. A system for this purpose was designed, and its operation was demonstrated taking the example of an acceptor roll of 1 m length and 250 mm diameter, which was covered by 56 patterned areas. Such a system represents an elegant and efficient tool to recombine small patterned areas directly on a large roll mold and opens the way for large-area roll-based processing.

Direct electrophoretic microRNA preparation from clinical samples using nanofilter membrane.

A method to directly collect negatively charged nucleic acids, such as DNA and RNA, in the biosamples simply by applying an electric field in between the sample and collection buffer separated by the nanofilter membrane is proposed. The nanofilter membrane was made of low-stress silicon nitride with a thickness of 100 nm, and multiple pores were perforated in a highly arranged pattern using nanoimprint technology with a pore size of 200 nm and a pore density of 7.22 × 108/cm2. The electrophoretic transport of hsa-mir-93-5p across the membrane was confirmed in pure microRNA (miRNA) mimic solution using quantitative reverse transcription-polymerase chain reactions (qRT-PCR). Consistency of the collected miRNA quantity, stability of the system during the experiment, and yield and purity of the prepared sample were discussed in detail to validate the effectiveness of the electrical protocol. Finally, in order to check the applicability of this method to clinical samples, liquid biopsy process was demonstrated by evaluating the miRNA levels in sera of hepatocellular carcinoma patients and healthy controls. This efficient system proposed a simple, physical idea in preparation of nucleic acid from biosamples, and demonstrated its compatibility to biological downstream applications such as qRT-PCR as the conventional nucleic acid extraction protocols.

Formation of Interstitial Hot-Spots Using the Reduced Gap-Size between Plasmonic Microbeads Pattern for Surface-Enhanced Raman Scattering Analysis.

To achieve an effective surface-enhanced Raman scattering (SERS) sensor with periodically distributed "hot spots" on wafer-scale substrates, we propose a hybrid approach combining physical nano-imprint lithography and a chemical deposition method to form a silver microbead array. Nano-imprint lithography (NIL) can lead to mass-production and high throughput, but is not appropriate for generating strong "hot-spots." However, when we apply electrochemical deposition to an NIL substrate and the reaction time was increased to 45 s, periodical "hot-spots" between the microbeads were generated on the substrates. It contributed to increasing the enhancement factor (EF) and lowering the detection limit of the substrates to 4.40 × 106 and 1.0 × 10-11 M, respectively. In addition, this synthetic method exhibited good substrate-to-substrate reproducibility (RSD < 9.4%). Our research suggests a new opportunity for expanding the SERS application.

Cuvette-based microfluidic device integrated with nanostructures for measuring dual Localized Surface Plasmon Resonance (LSPR) signals.

A spectrophotometer that uses a localized surface plasmon resonance phenomenon is a powerful measurement tool in the biotechnology and bioanalysis fields. We propose a novel cuvette design type that can be used for universal spectrophotometers. The novel cuvette design needs a few µl reagent for measuring, and also two chips for measurement can be loaded and measured at the same time. A new cuvette can easily be used several times because of sample chips to be loaded and unloaded since they are mechanically mounted by screws. Therefore, it can offer advantages to users in terms of cost and time. We verify its possibility for use in the biotechnology and bioanalysis fields by a signal enhancement and dual signal detection.

A modified squeeze equation for predicting the filling ratio of nanoimprint lithography.

A numerical method using the modified squeeze model is proposed in this paper in order to overcome the limitation of the established squeeze equation and obtain filling ratios for nanoimprint lithography (NIL). Because the imprinting velocity is overestimated when the ratio of indenter width to polymer thickness is close to unity, the modified equation is critical. For verification, the numerical results are compared with the experimental data according to the various stamp geometries and pressure variation rates, for which a maximum difference of 10% is indicated. Based on these results, additional studies are conducted using the modified squeeze equation in order to obtain filling ratios according to the polymer thickness and temperature. The filling rates are enhanced through the increases in the temperature and the polymer thickness. The results demonstrate that the modified squeeze equation can be used to obtain and predict the filling ratio of sub-nanoscale NIL fabrication. It is expected that this study will assist in optimizing the experimental conditions and approaches for roll-to-roll NIL and step-and-flash NIL.

Fabrication of nanometer electrodes by electro migration on an embedded metal pattern.

Electrodes with several tens nanometer gap are very important parts in the nano devices such as SETs (Single Electron Transistor), and quantum dots. However, fabricating nanometer electrode with the EBL (Electron Beam Lithography) process is too costly and time consuming to be commercially feasible. To overcome these disadvantages and to enable mass production, nano imprint lithography is applied to a master fabrication technique via EBL. In this paper, several tens nanometer gap electrodes are fabricated by EBL in order to characterize SET. The embedded metal pattern is made by the NIL (Nanoimprint Lithography) process, which is suggested for mass production. In order to fabricate without chemical process, the embedded metal process was executed with nanoimprint lithography. And the nanometer gap was made by electro migration process on flexible film substrate. That is, the electro migration process was executed on the embedded metal pattern to fabricate the nano gapped electrodes.

A new mold structure to replicate patterns over 1 microm in depth for substrate conformal imprint lithography.

This paper shows an improved mold replication process that uses polyurethane acrylate (PUA) and polyethylene terephthalate (PET) for the fabrication of an ultraviolet (UV) imprinting mold used in substrate conformal imprint lithography (SCIL). With the conventional replication process, which uses hard polydimethylsiloxane (h-PDMS) as a pattern layer, it is difficult to detach the mold from a silicon master for metal oxide semiconductor field effect transistor (MOSFET) that has patterns with over 1-micron depth. However, the method proposed in this paper allows us to easily replicate patterns that have more than 1-micron depth. The key idea of this method is to use PET film as a bonding layer to attach the PUA layer to the polydimethylsiloxane (PDMS) cushion layer to overcome the weak the adhesion force between the PUA and PDMS layer. We demonstrate how to make the modified replica mold and present imprinting results obtained using this replica mold in the SCIL process.

Nanoimprint lithography with a focused laser beam for the fabrication of nanopatterned microchannel molds.

We present a process based on nanoimprint lithography for the fabrication of a microchannel mold having nanopatterns formed at the bottoms of its microchannels. A focused laser beam selectively cures the resist in the micrometer scale during nanoimprint lithography. Nanopatterns within the microchannels may be used to control microfluidic behavior.

Pattern uniformity in large-area ultraviolet nano-imprinting by a cylindrically inflated flexible mold under low pressure.

This paper shows a novel nano-imprint method with a polydimethylsiloxane (PDMS) replica mold that was bonded on a cylindrically inflated polycarbonate (PC) film via a low air pressure. The PDMS mold, which was deformed in terms of its cylindrical shape, made a line contact with a substrate from the center region and the contact region, then expanded gradually to the outside of the substrate when the contact force increased. This contact procedure squeezed the resin that was dropped on the substrate from the center to the outside, which prevented the trapping of air bubbles while the cavities were filled with the patterns on the PDMS mold. The main characteristic of the proposed process was that the nano-imprint can be realized under a low pressure, compared to conventional processes. We will show the system that was implemented under the proposed process concept and the patterns that were transferred in an ultraviolet curable resin under pressure conditions of less than 5 kPa.

A symmetric motion estimation method for motion-compensated frame interpolation.

This paper proposes a new motion-compensated frame interpolation (MCFI) method. The proposed method utilizes a symmetric motion estimation (SME) method, which is a new pixel-wise motion estimation method for intermediate frame interpolation. By using an adaptive search range for the motion estimation, the proposed method can obtain a more reliable motion vector for each pixel than previous MCFI methods that use a conventional block matching algorithm (BMA). In addition, we propose a combined method of the SME and BMA to reduce the computation time of the pixel-wise motion estimation method. The experimental results show that the proposed method outperforms other MCFI methods in terms of generating objectively and subjectively better interpolated frames.

Incidence of cancer in the vicinity of Korean AM radio transmitters.

Results of various studies have indicated a potential association between exposures to electrical and/or magnetic fields and risks of various cancers. The authors used a cross-sectional ecological study design to investigate such a potential association. In areas proximate to 42 amplitude modulated (AM) radio transmitters, 11 high-power study sites (i.e., areas exposed to 100-1500-kW transmission power) and 31 low-power study sites (i.e., areas exposed to 50-kW transmission power) were identified. The incidence of cancer within a 2-km radius of each transmitter was obtained from (a) Korean medical-insurance data for the years 1993 through 1996, (b) population census data for the year 1995, and (c) resident registration data for the year 1995. The authors calculated age-standardized rate ratios for total cancer, leukemia, malignant lymphoma, brain cancer, and breast cancer, and compared the incidence of cancer within 2 km of the high-power transmitters vs. the incidence within 2 km of the low-power transmitters. Four control areas for each high-power transmitter were also selected. The control areas were located in the same, or nearest adjacent, province as the high-power sites, but were at least 2 km from any of the transmitters. Indirect standardized observed/expected ratios for the high-power sites vs. control areas were calculated for each transmitter separately, and for 4 transmitter groupings defined by power level (i.e., 100 kW, 250 kW, 500 kW, and 1500 kW). The authors found no significant increase in age-standardized rate ratios of cancers for high-power vs. low-power sites, with the exceptions of total cancer and of brain cancer in women. Among the 11 high-power sites, there were significantly increased incidences of leukemia in 2 areas and of brain cancer in 1 area. Future studies should incorporate additional detailed exposure assessments and a strong analytical study design to explore the possible association between radiofrequency radiation from AM radio transmitters and cancer.

A new impact actuator using linear momentum exchange of inertia mass.

For self-controlled endoscopes, many kinds of systems have been proposed. Among these, pneumatic actuators show significant potential. However, existing actuators, such as those used in endoscopes, have many weak points. In particular, free movement inside the human intestine is difficult because the diameter of the intestine varies dramatically along its length. We design and test a new method of locomotion of robotic endoscopes which allows safe manoeuverability in the human intestine. The actuating mechanism is composed of a solenoid at each end of the actuator and a single permanent magnet in the centre guide. If current is supplied to the two solenoids, attractive and repulsive forces occur between the permanent magnet and solenoid at each end. The permanent magnet moves by controlling the current supply period. When the current direction for operation is reversed, repulsive and attractive forces at each side are changed and the permanent magnet moves in the opposite direction. The collision at each period transfers momentum from the moving magnet to the actuator body. Furthermore, the moving speed of the actuator can be changed by the control of the impact force. Modelling and simulation are carried out to predict the performance of the actuator. The results of simulations are verified by comparison with experimental results. Finally, the momentum is measured by attaching an accelerometer to the solenoid head to define moving characteristics.